Ua ʻike mākou a pau he nui nā kikoʻī o ka sputtering target,ka mea i awide laulā o ka noi.TʻOkoʻa nō hoʻi nā ʻano like ʻole i hoʻohana mau ʻia ma nā ʻoihana like ʻole, i kēia lā e hele mai kākou me PekinaRichmat hui e aʻo e pili ana i ka sputtering target class classification.
一、Wehewehe o ka sputtering mea target
ʻO Sputtering kekahi o nā ʻenehana nui no ka hoʻomākaukau ʻana i nā mea kiʻiʻoniʻoni lahilahi.Hoʻohana ia i nā ion i hoʻokumu ʻia e ka punawai ion e hana i ka ion beam me ka ikaika velocity kiʻekiʻe ma o ka hōʻiliʻili ʻana i ka vacuum. ʻO ka ʻili o ka substrate, ʻo ka mea paʻa i hoʻopaʻa ʻia ka mea maka no ka hoʻomākaukau ʻana i ke kiʻiʻoniʻoni i waiho ʻia i ka sputtering, i kapa ʻia ʻo ka sputtering target.
二、Hoʻokaʻawale kahua noiʻi o nā mea i manaʻo ʻia sputtering
1、Semiconductor pahu hopu
(1)Mea hoʻohana maʻamau:ʻO nā pahuhopu maʻamau i kēia kahua he tantalum, keleawe, titanium, aluminika, gula, nickel a me nā metala hoʻoheheʻe kiʻekiʻe.
(2)Hoʻohana：Hoʻohana maʻamau i ka ʻikepili kumu koʻikoʻi o ka circuit integrated
(3)Nā koi hana：He kiʻekiʻe nā koi ʻenehana i ka maʻemaʻe, ka nui, ka hoʻohui.
2 、Mea i manaʻo ʻia no ka hōʻike planar
(1)Mea hoʻohana maʻamau：ʻO nā pahuhopu maʻamau i hoʻohana ʻia ma kēia kahua he alumini / keleawe / molybdenum / nickel / niobium / silicon / chromium, etc.
(2)Hoʻohana：Hoʻohana nui ʻia kēia ʻano mea i hoʻopaʻa ʻia i nā ʻano kiʻiʻoniʻoni nui o ka TV a me ka puke puke.
(3)Nā koi hana：ʻO nā koi kiʻekiʻe ma ka maʻemaʻe, ka nui o ka'āpana, ka likeʻole a me nā mea'ē aʻe.
3、Nā pahuhopu no nā pūnaewele lā
(1)Mea hoʻohana maʻamau：Hoʻohana maʻamau ʻia nā pahu pahu alumini / keleawe / Molybdenum / chromium / ITO / Ta i nā pūnaewele lā.
(2)Hoʻohana：Hoʻohana nui ʻia i ka "window layer", barrier layer, electrode a me conductive film a me nā manawa ʻē aʻe.
(3)Nā koi hana：Ke koi akamai kiʻekiʻe, ākea ka hoʻohana.
4、Mea paʻa no ka mālama ʻana i ka ʻike
(1)Mea hoʻohana maʻamau：Hoʻohana maʻamau ka mālama ʻana i ka ʻike cobalt/nickel/ferroalloy/chromium/tellurium/selenium.
(2)Hoʻohana：Hoʻohana nui ʻia ka mea i manaʻo ʻia no ke poʻo, ka papa waena a me ka papa lalo o ka cd-rom a me ka CD.
(3) Nā koi hana：Pono ka nui o ka mālama ʻana a me ka wikiwiki hoʻouna kiʻekiʻe.
5、Mea paʻa no ka hoʻololi ʻana i ka mea hana
(1)Mea hoʻohana maʻamau：Mea hoʻololi o ka titanium/zirconium/lattice/chrome-aluminum alloy a me nā pahuhopu ʻē aʻe.
(2)Hoʻohana:Hoʻohana pinepine ʻia no ka hoʻonui ʻana i ka helehelena.
(3)Nā koi hana：Nā koi hana kiʻekiʻe, ola lōʻihi.
6、Nā mea i manaʻo ʻia no nā mea uila
(1)Mea hoʻohana maʻamau:Hoʻohana pinepine ʻia nā pahu pahu alumini / silicida i nā mea uila
(2)Hoʻohana：Hoʻohana maʻamau no nā pale kiʻiʻoniʻoni a me nā capacitors.
(3)Nā koi hana：ʻO ka liʻiliʻi liʻiliʻi, kūpaʻa, haʻahaʻa haʻahaʻa pale wela coefficient
Ka manawa hoʻouna: Apr-21-2022