He nui nā hopena o ka pahuhopu, a nui ka wahi hoʻomohala mākeke.He mea pono loa ia ma na kahua he nui.Aneane pau loa nā lako sputtering hou e hoʻohana i nā magnet ikaika i nā electrons spiral e hoʻokē ai i ka ionization o argon a puni ka pahu hopu, ka hopena i ka hoʻonui ʻana i ka likelika o ka hui ʻana ma waena o ka pahuhopu a me nā ion argon.I kēia manawa, e nānā kākou i ke kuleana o ka sputtering target i loko o ka uhi ʻana i ka ʻūhā.
E hoʻomaikaʻi i ka nui o ka sputtering.ʻO ka mea maʻamau, hoʻohana ʻia ka DC sputtering no ka uhi metala, aʻo ka RF AC sputtering e hoʻohana ʻia no nā mea hoʻonaninani ceramic non-conductive.ʻO ke kumu kumu, ʻo ia ka hoʻohana ʻana i ka hoʻokuʻu ʻana i ka argon (AR) i nā ion ma ka ʻili o ka pahu i loko o ka vacuum, a e wikiwiki nā cations i ka plasma e holo wikiwiki i ka ʻili electrode maikaʻi ʻole e like me ka mea splashed.Na kēia hopena e lele i waho ka mea o ka pahu hopu a waiho ma luna o ka substrate e hana i kahi kiʻiʻoniʻoni.
ʻO ka ʻōlelo maʻamau, aia kekahi mau hiʻohiʻona o ka uhi kiʻiʻoniʻoni ma ke kaʻina sputtering: (1) hiki ke hana ʻia me ka metala, ka hao a i ʻole insulator i ʻikepili kiʻiʻoniʻoni.
(2) Ma lalo o nā kūlana hoʻonohonoho kūpono, hiki ke hana ʻia ke kiʻiʻoniʻoni me ka haku mele like ʻana mai nā pahuhopu he nui a me ka pilikia.
(3) Hiki ke hana ʻia ka hui ʻana a i ʻole ka hui ʻana o nā mea i manaʻo ʻia a me nā molekele kinoea ma o ka hoʻohui ʻana i ka oxygen a i ʻole nā kinoea hana ʻē aʻe i ka lewa hoʻokuʻu.
(4) Hiki ke ho'omalu 'ia ka ho'okomo 'ana i kēia manawa a me ka manawa sputtering, a ma'alahi ka loa'a 'ana o ka mānoanoa ki'i ki'eki'e.
(5) Ke hoʻohālikelikeʻia me nā kaʻina hana'ē aʻe, he mea kūpono ia i ka hanaʻana i nā kiʻiʻoniʻoni nui.
(6) Aneane pili ole ka umekaumaha i ka umekaumaha, a hiki ke hoonohonoho pono ia na kulana o ka pahu hopu a me ka substrate.
Ka manawa hoʻouna: Mei-17-2022