ʻO nā waiwai nui o ka sputtering mea kiʻekiʻe

Pono mākou e kamaʻāina loa i ka pahuhopu i kēia manawa, i kēia manawa ke piʻi nei ka mākeke makaʻāina, ʻo ia ka mea o ka hana nui o ka sputtering target i kaʻana like ʻia e ka mea hoʻoponopono mai RSM

　　ʻO ka maʻemaʻe

ʻO ka maʻemaʻe o nā mea i hoʻopaʻa ʻia ʻo ia kekahi o nā papa kuhikuhi hana nui, no ka mea, ʻo ka maʻemaʻe o ka mea i hoʻopaʻa ʻia he mana nui i ka hana ʻana o nā kiʻiʻoniʻoni lahilahi.Eia nō naʻe, ma ka hoʻohana pono ʻana, ʻaʻole like nā koi maʻemaʻe o nā mea i hoʻopaʻa ʻia.No ka laʻana, me ka hoʻomohala wikiwiki ʻana o ka ʻoihana microelectronics, ua hoʻomohala ʻia ka nui o ka silicon chip mai 6 ", 8" a hiki i 12", a ua hoʻemi ʻia ka laulā uila mai 0.5um a i 0.25um, 0.18um a i ʻole 0.13um.Ma mua, hiki i ka maʻemaʻe o ka 99.995% mea hoʻolālā ke hoʻokō i nā koi kaʻina o 0.35umIC.ʻO ka maʻemaʻe o ka mea i manaʻo ʻia ʻo 99.999% a i ʻole 99.9999% no ka hoʻomākaukau ʻana i nā laina 0.18um.

　　maʻiʻo haumia

ʻO nā mea haumia i loko o ka pahu paʻa a me ka oxygen a me ka wai i loko o nā pores nā kumu haumia nui o ka waiho ʻana i nā kiʻiʻoniʻoni.He ʻokoʻa nā koi no nā ʻano mea haumia like ʻole.No ka laʻana, ʻo nā pahu alumini maʻemaʻe a me nā alumini alumini i hoʻohana ʻia i ka ʻoihana semiconductor he koi kūikawā no ka ʻike o nā metala alkali a me nā mea radioactive.

　　ʻO ka mānoanoa

I mea e ho'ēmi ai i ka porosity i loko o ka pahu hopu paʻa a hoʻomaikaʻi i ka hana o ka sputtering film, kiʻekiʻe kiʻekiʻe o ka pahu hopu e koi pinepine.ʻAʻole pili ka mānoanoa o ka pahu hopu i ka nui o ka sputtering akā ʻo nā pono uila a me ka optical o ke kiʻiʻoniʻoni.ʻOi aku ka kiʻekiʻe o ka pahu hopu, ʻoi aku ka maikaʻi o ka hana kiʻiʻoniʻoni.Eia kekahi, ʻo ka hoʻonui ʻana i ka nui a me ka ikaika o ka pahu hopu e ʻoi aku ka maikaʻi o ka pale ʻana i ke koʻikoʻi wela i ke kaʻina sputtering.ʻO ka Density kekahi o nā papa kuhikuhi hana nui o ka pahuhopu.

　　ʻO ka nui o ka palaoa a me ka hoʻolaha ʻana i ka nui o ka palaoa

ʻO ka pahuhopu he polycrystalline me ka nui o ka palaoa mai ka micrometer a millimeter.No ka pahu hoʻokahi, ʻoi aku ka wikiwiki o ka sputtering o ka pahu me nā hua liʻiliʻi ma mua o ka pahu me nā hua nui.ʻO ka māhele mānoanoa o nā kiʻiʻoniʻoni i waiho ʻia e ka sputtering target me ka liʻiliʻi liʻiliʻi o ka ʻokoʻa o ka palaoa (ka hāʻawi like ʻana) ʻoi aku ka like.