Nā koi hana no nā mea i hoʻopaʻa ʻia i loko o ka ʻoihana mālama optical

Pono ka maʻemaʻe kiʻekiʻe o ka mea i hoʻohana ʻia i ka ʻoihana mālama ʻikepili, a pono e hoʻemi ʻia nā haumia a me nā pores e pale aku i ka hana ʻana o nā ʻāpana haumia i ka wā sputtering.ʻO ka mea i hoʻohana ʻia no nā huahana kiʻekiʻe e koi ʻia ka liʻiliʻi a me ke ʻano like ʻole o kona nui aniani, ʻaʻohe ʻano aniani.Ma lalo iho nei, e nānā kākou i nā koi o ka ʻoihana hoʻopaʻa ʻike no ka mea i manaʻo ʻia?

1. Maemae

Ma nā noi kūpono, ʻokoʻa ka maʻemaʻe o nā mea i makemake ʻia e like me nā ʻoihana like ʻole a me nā koi.Eia nō naʻe, ʻoi aku ka kiʻekiʻe o ka maʻemaʻe o ka mea i manaʻo ʻia, ʻoi aku ka maikaʻi o ka hana o ke kiʻi sputtered.No ka laʻana, i ka ʻoihana mālama huna, pono ka maʻemaʻe o ka mea i manaʻo ʻia e ʻoi aku ka nui ma mua o 3N5 a i ʻole 4N.

2. Maʻiʻo haumia

ʻO ka mea i hoʻopaʻa ʻia e like me ke kumu cathode i ka sputtering, a ʻo nā haumia i loko o ka paʻa a me ka oxygen a me ka wai i loko o nā pores nā kumu haumia nui no ka waiho ʻana i nā kiʻiʻoniʻoni lahilahi.Eia kekahi, aia nā koi kūikawā no nā pahuhopu o nā hoʻohana like ʻole.ʻO ka lawe ʻana i ka ʻoihana mālama optical ma ke ʻano he laʻana, pono e hoʻokele haʻahaʻa loa ka ʻike haumia i ka sputtering target e hōʻoia i ka maikaʻi o ka uhi.

3. Ka nui o ka palaoa a me ka mahele nui

ʻO ka mea maʻamau, loaʻa kahi ʻano polycrystalline ka mea i manaʻo ʻia, me ka nui o ka palaoa mai ka micrometers a i ka millimeters.No nā pahu hopu me ka haku mele like ʻana, ʻoi aku ka wikiwiki o ka sputtering rate o nā pahu palaoa maikaʻi ma mua o nā pahu kīʻaha koʻikoʻi.No nā pahu hopu me nā ʻokoʻa liʻiliʻi liʻiliʻi, ʻoi aku ka like o ka mānoanoa kiʻi i waiho ʻia.

4. Hoʻopaʻa

I mea e hōʻemi ai i ka porosity i loko o ka mea paʻa paʻa paʻa a hoʻomaikaʻi i ka hana kiʻiʻoniʻoni, maʻamau e koi ʻia ka sputtering target material i kahi kiʻekiʻe kiʻekiʻe.ʻO ka mānoanoa o ka mea i hoʻopaʻa ʻia ma muli o ke kaʻina hana hoʻomākaukau.ʻO ka mea i hana ʻia e ka hoʻoheheʻe ʻana a me ka hoʻolei ʻana e hiki ke hōʻoia i ka ʻole o nā pores i loko o ka mea i hoʻopaʻa ʻia a kiʻekiʻe loa ka density.